Extreme Ultraviolet Technology and the Applications. Microfabrication Process Using Synchrotron Radiation Excited Photodecomposition.
نویسندگان
چکیده
منابع مشابه
Synchrotron Radiation/lasers and Doubly-excited Atoms
This report highlights a series of joint theoretical and experimental collaborations which started over ten years ago in Taiwan. The recent topic program Synchrotron Radiation and Multiply-excited Atoms, sponsored by the National Center for Theoretical Sciences (NCTS) at Tsinghua University in Hsinchu and organized by K. T. Chung and C. S. Hsu, o®ers an excellent opportunity for many of us to w...
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Measurement of synchrotron-radiation-excited Kossel patterns.
Kossel line patterns contain information on the crystalline structure, such as the magnitude and the phase of Bragg reflections. For technical reasons, most of these patterns are obtained using electron beam excitation, which leads to surface sensitivity that limits the spatial extent of the structural information. To obtain the atomic structure in bulk volumes, X-rays should be used as the exc...
متن کاملCalibration of an extreme-ultraviolet transmission grating spectrometer with synchrotron radiation.
The responsivity of an extreme-ultraviolet transmission grating spectrometer with silicon photodiode detectors was measured with synchrotron radiation. The spectrometer was designed to record the absolute radiation flux in a wavelength bandpass centered at 30 nm. The transmission grating had a period of 200 nm and relatively high efficiencies in the +1 and the -1 diffraction orders that were di...
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 1998
ISSN: 1882-675X,0912-0289
DOI: 10.2493/jjspe.64.1008